Product Lists
YAG
General Information
- CIP (Cold Isostatic Pressing) Yttrium Aluminate Granule (Y3AL5O12)
- A Powder to protect Dry Etch Chamber, applied by thermal spray
Key Benefits
- High purity granule which enables high quality ceramics
- Easy sintering with low and stable shrinkage rate
Suggested Uses
- Semiconductor / Parts & components for “Metal Etcher”
Purity Data
| Item | ppm | Item | ppm |
| Na | ≦20 | Ni | ≦5 |
| Mg | ≦10 | Cu | ≦5 |
| Si | ≦100 | Zn | ≦10 |
| K | ≦20 | La | ≦50 |
| Ca | ≦20 | Ho | ≦50 |
| Ti | ≦5 | Er | ≦50 |
| Cr | ≦5 | Zr | ≦100 |
| Fe | ≦10 |
Powder Distribution
YOF
Features of NYC’s Y-O-F granules
- Powder characteristics such as particle size, oxygen content, are customizable
- Excellent feeding stability and coating performance
| Properties | Purity | Impurity | Oxygen | Particle Size | A.D. | |
| Unit | Y/TREO | Fe | Ca | D50 | ||
| % | ppm | ppm | wt% | μm | g/cm³ | |
| Y-O-F Powder | ＞99 | ＜10 | ＜10 | 3-13 | 30-50 | 1.2-1.6 |
| Y | O | F | ||||
| atomic% | wt% | atomic% | wt% | atomic% | wt% | |
| YOF | 33.3 | 71.8 | 33.3 | 12.9 | 33.3 | 15.3 |
| Y₅O₄F₇ | 31.3 | 69.3 | 25.0 | 10.0 | 43.7 | 20.7 |
Yttrium Coating (CVD)
Feature of “Y2O3 coating”
“Y2O3 coating” is high purity yttria film formed by CVD method.
- High purity grade
- Superior halogen resistance
- Particle Free
- Excellent performance of step coverage
| CVD Apparatus Part Size | Small Size CVD | Large Size CVD |
| Diameter (Ø) | ＜Ø150mm | ＜Ø600mm |
| Height (t) | t=50mm | t=200mm |